{"product_id":"9780444513397","title":"Rapid Thermal Processing for Future Semiconductor Devices","description":"\u003cp\u003eA collection of papers which were presented at the 2001 International Conference on Rapid Thermal Processing (RTP 2001) held at Ise Shima, Mie, on November 14-16, 2001. It covers the following areas such as advanced MOS gate stack, integration technologies, advancd channel engineering including shallow junction, SiGe and hetero-structure.\u003c\/p\u003e","brand":"Elsevier Science Ltd","offers":[{"title":"Default Title","offer_id":49106164482275,"sku":"00000_00000_00000_00000","price":137.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0764\/3758\/6147\/files\/9780444513397-1.jpg?v=1788340601","url":"https:\/\/usa.kinokuniya.com\/products\/9780444513397","provider":"Books Kinokuniya USA","version":"1.0","type":"link"}